Process Features
- Twin Well CMOS
- LOCOS Isolation
- Gate Oxide 85 A
- Gate: 0.36 µm (width) 0.78 µm (pitch)
- Contact Diameter: 0.48 µm
- 3 to 4 Al capability
- 1 Al: 0.60 µm (width) 1.12 µm (pitch)
- 2-3 Al: 0.72 µm (width) 1.32 µm (pitch)
- 4 Al: 1.0 µm (width) 2.0 µm (pitch)
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Device Features
- Supply Voltage: 3.3
0.3 V (Normal Transistor)
- Supply Voltage: 5.0
0.5 V (Multi Oxide Transistor)
- Min. Transistor Width: 0.9 um
- Min. Transistor Pitch: 1.36 um (Min. Gate Pitch w/ Contact)
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